3-DIMENSIONAL SIMULATION OF LOCAL OXIDATION OF SILICON

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UMIMOTO, H

ODANAKA, S

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1989 SYMPOSIUM ON VLSI TECHNOLOGY: DIGEST OF TECHNICAL PAPERS | 1989年

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TM [电工技术]; TN [电子技术、通信技术];

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0808 ; 0809 ;

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页码：47 / 48

页数：2

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