MONTE-CARLO SIMULATION APPROACH TO SPUTTERING IN MULTI-COMPONENT TARGETS

被引：44

作者：

KANG, HJ ^{[1
]}

KAWATOH, E ^{[1
]}

SHIMIZU, R ^{[1
]}

机构：

[1] OSAKA UNIV,DEPT APPL PHYS,SUITA,OSAKA 565,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1985年 / 24卷 / 11期

关键词：

D O I：

10.1143/JJAP.24.1409

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1409 / 1416

页数：8

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