MONTE-CARLO SIMULATION APPROACH TO SPUTTERING IN MULTI-COMPONENT TARGETS

被引：44
|
作者：
KANG, HJ [1 ]
KAWATOH, E [1 ]
SHIMIZU, R [1 ]
机构：
[1] OSAKA UNIV,DEPT APPL PHYS,SUITA,OSAKA 565,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1985年 / 24卷 / 11期
关键词：
D O I：
10.1143/JJAP.24.1409
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1409 / 1416
页数：8
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