A CAPACITIVE HUMIDITY SENSOR BASED ON CMOS TECHNOLOGY WITH ADSORBING FILM

被引：20
|
作者：
PARAMESWARAN, M
BALTES, HP
BRETT, MJ
FRASER, DE
ROBINSON, AM
机构：
[1] UNIV ALBERTA,ALBERTA MICROELECTR CTR,EDMONTON T6G 2G7,ALBERTA,CANADA
[2] SWISS FED INST TECHNOL,INST QUANTUM ELECTR,CH-8093 ZURICH,SWITZERLAND
来源：
SENSORS AND ACTUATORS | 1988年 / 15卷 / 04期
关键词：
We gratefully acknowledge the services of the Canadian Microelectronic Corporation (CMC) in arranging the chip fabrication. We are also grateful for the facilities offered by the Physical Plant; University of Alberta; to test the sensors. This work has been supported by the Natural Science and Engineering Research Council of Canada (NSERC);
D O I：
10.1016/0250-6874(88)81503-8
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
16
引用
收藏
页码：325 / 335
页数：11
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