PHOTO PROCESSES AND THERMOPROCESSES IN LASER-INDUCED CHEMICAL-REACTIONS AT SEMICONDUCTOR SURFACES

被引：0
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作者：
BUNKIN, NF
LUKYANCHUK, BS
SHAFEEV, GA
机构：
来源：
JOURNAL OF INFORMATION RECORDING MATERIALS | 1987年 / 15卷 / 05期
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T [工业技术];
学科分类号：
08 ;
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页码：323 / 344
页数：22
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