AN EXPERIMENTAL-STUDY OF A PARALLEL-PLATE RADIO-FREQUENCY DISCHARGE - MEASUREMENTS OF THE RADIATION TEMPERATURE AND ELECTRON-DENSITY

被引：43
|
作者：
HEBNER, GA [1 ]
VERDEYEN, JT [1 ]
KUSHNER, MJ [1 ]
机构：
[1] UNIV ILLINOIS,GASEOUS ELECTR LAB,CHAMPAIGN,IL 61820
来源：
JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 07期
关键词：
D O I：
10.1063/1.341060
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：2226 / 2236
页数：11
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