NANOSCALE PATTERNING AND SELECTIVE CHEMISTRY OF SILICON SURFACES BY UHV-STM

被引:0
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作者
LYDING, JW
机构
[1] UNIV ILLINOIS,BECKMAN INST,URBANA,IL 61801
[2] UNIV ILLINOIS,DEPT ELECT & COMP ENGN,URBANA,IL 61801
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中图分类号
O6 [化学];
学科分类号
0703 ;
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页码:147 / PHYS
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