INSITU INVESTIGATION OF SUBSTRATE SURFACE RE-CONTAMINATION DURING GLOW-DISCHARGE SPUTTER CLEANING

被引：8

作者：

KOMINIAK, GJ ^{[1
]}

UHL, JE ^{[1
]}

机构：

[1] SANDIA LABS,ALBUQUERQUE,NM 87115

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1976年 / 13卷 / 01期

关键词：

D O I：

10.1116/1.568816

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：170 / 174

页数：5

共 24 条

[1] AN INSITU GLOW-DISCHARGE CLEANING METHOD FOR THE LEP VACUUM-SYSTEM
STORI, H
VACUUM, 1983, 33 (03) : 171 - 178
[2] INSITU REACTIVE CLEANING OF X-RAY OPTICS BY GLOW-DISCHARGE
JOHNSON, ED
GARRETT, RF
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1988, 266 (1-3): : 381 - 385
[3] SPECIMEN DAMAGE DURING SPUTTER-COATING BY GLOW-DISCHARGE
WATANABE, E
ONO, A
JOURNAL OF ELECTRON MICROSCOPY, 1976, 25 (01): : 55 - 55
[4] INSITU REACTIVE GLOW-DISCHARGE CLEANING OF X-RAY OPTICAL-SURFACES
JOHNSON, ED
HULBERT, SL
GARRETT, RF
WILLIAMS, GP
KNOTEK, ML
REVIEW OF SCIENTIFIC INSTRUMENTS, 1987, 58 (06): : 1042 - 1045
[5] INSITU ARGON GLOW-DISCHARGE CLEANING IN THE SOR-RING VACUUM-SYSTEM
KITAMURA, H
NUCLEAR INSTRUMENTS & METHODS, 1980, 177 (01): : 107 - 109
[6] SUBSTRATE SURFACE CONTAMINATION FROM DARK-SPACE SHIELDING DURING SPUTTER CLEANING
KOMINIAK, GJ
UHL, JE
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (06): : 1193 - 1194
[7] SURFACE CLEANING BY GLOW-DISCHARGE IN A HIGH VOLUME GAS-FLOW
WESTON, JP
BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1974, 19 (09): : 927 - 927
[8] DEUTERATED IMPURITIES MONITORED BY MICROWAVE SPECTROSCOPY DURING GLOW-DISCHARGE CLEANING
MUSHIAKI, M
KUBOTA, Y
FUNATO, Y
MIYAHARA, A
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1992, 31 (03): : 913 - 917
[9] Bacterial re-contamination of surfaces of food processing lines during cleaning in place procedures
Le Gentil, Caroline
Sylla, Yahaya
Faille, Christine
JOURNAL OF FOOD ENGINEERING, 2010, 96 (01) : 37 - 42
[10] INVESTIGATIONS ON PLASMA-ASSISTED SURFACE CLEANING OF ALUMINUM IN AN OXYGEN GLOW-DISCHARGE
KERSTEN, H
BEHNKE, JF
EGGS, C
CONTRIBUTIONS TO PLASMA PHYSICS, 1994, 34 (04) : 563 - 574

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