VERTICAL MICRO POSITIONING SYSTEM USING PZT ACTUATORS

被引：0
|
作者：
GOTO, H
SASAOKA, T
机构：
来源：
BULLETIN OF THE JAPAN SOCIETY OF PRECISION ENGINEERING | 1988年 / 22卷 / 04期
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D O I：
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中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
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页码：277 / 282
页数：6
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