STRESS, STRAIN, AND SYMMETRY OF PSEUDOMORPHICALLY GROWN EPITAXIAL LAYERS

被引:2
|
作者
TEMPEL, A
MADER, M
机构
[1] Technische Universität Dresden, Institut für Werkstoffphysik, Dresden, O-8027
关键词
D O I
10.1002/crat.2170270218
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The complete stress and strain tensors and the point symmetry of pseudomorphically grown epitaxial layers are calculated from the epitaxial relationship and the elastic constants of the deposit material. The angle misalignment of crystallographic directions in the deposit due to the strain is also calculated and results are given for the epitaxial systems CaF2/Si(100) and CaF2/Si(111).
引用
收藏
页码:259 / 266
页数:8
相关论文
共 50 条
  • [1] Strain analysis in pseudomorphically grown GaN-based multiple epitaxial layers
    Jang, Donghyun
    Shim, Jongin
    SEMICONDUCTOR LASERS AND APPLICATIONS III, 2008, 6824
  • [2] Indium-rich InGaN epitaxial layers grown pseudomorphically on a nano-sculpted InGaN template
    Xue, J. J.
    Chen, D. J.
    Liu, B.
    Lu, H.
    Zhang, R.
    Zheng, Y. D.
    Cui, B.
    Wowchak, Andrew M.
    Dabiran, Amir M.
    Xu, K.
    Zhang, J. P.
    OPTICS EXPRESS, 2012, 20 (07): : 8093 - 8099
  • [3] Strain Dependence of Piezoelectric Coefficients for Pseudomorphically Grown Semiconductors
    Garg, R.
    Migliorato, M.
    Haxha, V.
    Hue, A.
    Srivastava, G. P.
    Hammerschmidt, T.
    NUSOD '08: PROCEEDINGS OF THE 8TH INTERNATIONAL CONFERENCE ON NUMERICAL SIMULATION OF OPTOELECTRONIC DEVICES, 2008, : 109 - +
  • [4] Strain dependence of piezoelectric coefficients for pseudomorphically grown semiconductors
    Garg, R.
    Haxha, V.
    Migliorato, M. A.
    Hue, A.
    Srivastava, G. P.
    Hammerschmidt, T.
    MICROELECTRONICS JOURNAL, 2009, 40 (03) : 601 - 603
  • [5] Relaxation of thermal strain in GaN epitaxial layers grown on sapphire
    Gfrorer, O
    Schlusener, T
    Harle, V
    Scholz, F
    Hangleiter, A
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1997, 43 (1-3): : 250 - 252
  • [6] Strain in GaAs layers grown by liquid phase epitaxial lateral overgrowth
    Zytkiewicz, ZR
    Domagala, J
    Dobosz, D
    Bak-Misiuk, J
    JOURNAL OF APPLIED PHYSICS, 1999, 86 (04) : 1965 - 1969
  • [7] Strain relaxation in AlN epitaxial layers grown on GaN single crystals
    Langer, R
    Barski, A
    Barbier, A
    Renaud, G
    Leszczynski, M
    Grzegory, I
    Porowski, S
    JOURNAL OF CRYSTAL GROWTH, 1999, 205 (1-2) : 31 - 35
  • [8] Theory of strain relaxation for epitaxial layers grown on substrate of a finite dimension
    Huang, FY
    PHYSICAL REVIEW LETTERS, 2000, 85 (04) : 784 - 787
  • [9] THERMAL-STRESS IN GAN EPITAXIAL LAYERS GROWN ON SAPPHIRE SUBSTRATES
    KOZAWA, T
    KACHI, T
    KANO, H
    NAGASE, H
    KOIDE, N
    MANABE, K
    JOURNAL OF APPLIED PHYSICS, 1995, 77 (09) : 4389 - 4392
  • [10] Effect of strain transfer on critical thickness for epitaxial layers grown on compliant substrate
    Huang, FY
    APPLIED PHYSICS LETTERS, 2000, 76 (21) : 3046 - 3048