QUANTUM-WELL INTERMIXING

被引:287
|
作者
MARSH, JH
机构
[1] Dept. of Electron. and Electr. Eng., Glasgow Univ.
关键词
D O I
10.1088/0268-1242/8/6/022
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Intermixing the wells and barriers of quantum well structures generally results in an increase in the bandgap and is accompanied by changes in the refractive index. A range of techniques, based on impurity diffusion, dielectric capping and laser annealing, has been developed to enhance the quantum well intermixing (QWI) rate in selected areas of a wafer; such processes offer the prospect of a powerful and relatively simple fabrication route for integrating optoelectronic devices and for forming photonic integrated circuits (PICS). Recent progress in QWI techniques is reviewed, concentrating on processes which are compatible with PIC applications, in particular the achievement of low optical propagation losses.
引用
收藏
页码:1136 / 1155
页数:20
相关论文
共 50 条
  • [21] Monolithic integration via a universal damage enhanced quantum-well intermixing technique
    McDougall, Stewart D.
    Kowalski, Olek P.
    Hamilton, Craig J.
    Camacho, Fernando
    Qiu, Bocang
    Ke, Maolong
    De La Rue, Richard M.
    Bryce, A.Catrina
    Marsh, John H.
    IEEE Journal on Selected Topics in Quantum Electronics, 1998, 4 (04): : 636 - 645
  • [22] Selective modification of band gap in GaInNAs/GaAs structures by quantum-well intermixing
    Macaluso, R
    Sun, HD
    Dawson, MD
    Robert, F
    Bryce, AC
    Marsh, JH
    Riechert, H
    APPLIED PHYSICS LETTERS, 2003, 82 (24) : 4259 - 4261
  • [23] Quantum-well intermixing for the control of second-order nonlinear effects in AlGaAs multiple-quantum-well waveguides
    Street, MW
    Whitbread, ND
    Hutchings, DC
    Arnold, JM
    Marsh, JH
    Aitchison, JS
    Kennedy, GT
    Sibbett, W
    OPTICS LETTERS, 1997, 22 (21) : 1600 - 1602
  • [25] Controlling Third-Order Nonlinearities by Ion-Implantation Quantum-Well Intermixing
    Wagner, Sean J.
    Holmes, Barry M.
    Younis, Usman
    Helmy, Amr S.
    Hutchings, David C.
    Aitchison, J. Stewart
    IEEE PHOTONICS TECHNOLOGY LETTERS, 2009, 21 (1-4) : 85 - 87
  • [26] Argon plasma exposure enhanced intermixing in an undoped InGaAsP/InP quantum-well structure
    Nie, D.
    Mei, T.
    Tang, X. H.
    Chin, M. K.
    Djie, H. S.
    Wang, Y. X.
    JOURNAL OF APPLIED PHYSICS, 2006, 100 (04)
  • [27] A study of Si1-xGex/Si quantum-well intermixing by photocurrent spectroscopy
    Li, C
    Yang, QQ
    Chen, YH
    Wang, HJ
    Wang, JZ
    Yu, JZ
    Wang, QM
    THIN SOLID FILMS, 2000, 359 (02) : 236 - 238
  • [28] DEFECT DIFFUSION IN ION-IMPLANTED ALGAAS AND INP - CONSEQUENCES FOR QUANTUM-WELL INTERMIXING
    POOLE, PJ
    CHARBONNEAU, S
    AERS, GC
    JACKMAN, TE
    BUCHANAN, M
    DION, M
    GOLDBERG, RD
    MITCHELL, IV
    JOURNAL OF APPLIED PHYSICS, 1995, 78 (04) : 2367 - 2371
  • [29] NONLINEAR GAIN EFFECTS IN QUANTUM-WELL, QUANTUM-WELL WIRE, AND QUANTUM-WELL BOX LASERS
    TAKAHASHI, T
    ARAKAWA, Y
    IEEE JOURNAL OF QUANTUM ELECTRONICS, 1991, 27 (06) : 1824 - 1829
  • [30] Proton irradiation-induced intermixing in InGaAs/(Al)GaAs quantum wells and quantum-well lasers
    Fu, L
    Tan, HH
    Johnston, MB
    Gal, M
    Jagadish, C
    JOURNAL OF APPLIED PHYSICS, 1999, 85 (09) : 6786 - 6789