INVESTIGATION OF THE SOLVENT-EVAPORATION EFFECT ON SPIN COATING OF THIN-FILMS

被引：96
|
作者：
CHEN, BT
机构：
来源：
POLYMER ENGINEERING AND SCIENCE | 1983年 / 23卷 / 07期
关键词：
D O I：
10.1002/pen.760230706
中图分类号：
TQ [化学工业];
学科分类号：
0817 ;
摘要：
引用
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页码：399 / 403
页数：5
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