SCANNING ELECTRON-BEAM LITHOGRAPHY FOR FABRICATION OF MAGNETIC-BUBBLE CIRCUITS

被引：18
|
作者：
CHANG, THP [1 ]
HATZAKIS, M [1 ]
WILSON, AD [1 ]
SPETH, AJ [1 ]
KERN, A [1 ]
LUHN, H [1 ]
机构：
[1] IBM CORP, THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源：
IBM JOURNAL OF RESEARCH AND DEVELOPMENT | 1976年 / 20卷 / 04期
关键词：
D O I：
10.1147/rd.204.0376
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
引用
收藏
页码：376 / 388
页数：13
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