SCANNING ELECTRON-BEAM LITHOGRAPHY FOR FABRICATION OF MAGNETIC-BUBBLE CIRCUITS

被引：18
|
作者：
CHANG, THP [1 ]
HATZAKIS, M [1 ]
WILSON, AD [1 ]
SPETH, AJ [1 ]
KERN, A [1 ]
LUHN, H [1 ]
机构：
[1] IBM CORP, THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源：
IBM JOURNAL OF RESEARCH AND DEVELOPMENT | 1976年 / 20卷 / 04期
关键词：
D O I：
10.1147/rd.204.0376
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
引用
收藏
页码：376 / 388
页数：13
相关论文
共 50 条
  • [1] Fabrication of submicrometric magnetic structures by electron-beam lithography
    Martin, JI
    Jaccard, Y
    Hoffmann, A
    Nogues, J
    George, JM
    Vicent, JL
    Schuller, IK
    JOURNAL OF APPLIED PHYSICS, 1998, 84 (01) : 411 - 415
  • [2] ELECTRON-BEAM TECHNIQUES FOR MAGNETIC BUBBLE DEVICE FABRICATION
    HARRIS, RA
    CLEGG, WW
    PICKARD, RM
    GOURLEY, SF
    HARDY, CJ
    RADIO AND ELECTRONIC ENGINEER, 1973, 43 (07): : 430 - 434
  • [3] ELECTRON-BEAM LITHOGRAPHY FOR MICROCIRCUIT FABRICATION
    AHMED, H
    ELECTRONICS AND POWER, 1976, 22 (07): : 433 - 436
  • [4] ELECTRON-BEAM LITHOGRAPHY IN TELECOMMUNICATIONS DEVICE FABRICATION .1. ELECTRON-BEAM LITHOGRAPHY MACHINES
    JONES, ME
    DIX, C
    BRITISH TELECOM TECHNOLOGY JOURNAL, 1989, 7 (01): : 25 - 43
  • [5] Quality analysis of mask fabrication by raster scanning with electron-beam lithography system
    Wang, Guoquan
    Luo, Tengjiao
    Chen, Fuyu
    Xu, Zhiru
    Weixi Jiagong Jishu/Microfabrication Technology, 1993, (02): : 12 - 16
  • [6] MAGNETIC-BUBBLE LOGIC CIRCUITS
    KINOSHITA, K
    SASAO, T
    MATSUDA, J
    IEEE TRANSACTIONS ON COMPUTERS, 1976, 25 (03) : 247 - 253
  • [7] ELECTRON-BEAM LITHOGRAPHY WITH THE SCANNING TUNNELING MICROSCOPE
    MARRIAN, CRK
    DOBISZ, EA
    DAGATA, JA
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (06): : 2877 - 2881
  • [8] MAGNETIC-BUBBLE DEVICE FABRICATION USING X-RAY LITHOGRAPHY
    STEIN, B
    CASEY, M
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (03) : C152 - C152
  • [9] FABRICATION OF MICROELECTRONIC DEVICES WITH ELECTRON-BEAM LITHOGRAPHY
    TING, CH
    HATZAKIS, M
    LEONE, RA
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06): : 1304 - 1304
  • [10] NANOMETRIC FABRICATION USING ELECTRON-BEAM LITHOGRAPHY
    WILKINSON, CDW
    BEAUMONT, SP
    INSTITUTE OF PHYSICS CONFERENCE SERIES, 1990, (98): : 219 - 226
12345