EFFECT OF MULTIPLE IMPLANTS ON THE MIXING OF ALAS/GAAS SUPERLATTICES

被引：6
|
作者：
VENKATESAN, T [1 ]
SCHWARZ, SA [1 ]
HWANG, DM [1 ]
BHAT, R [1 ]
YOON, HW [1 ]
ARAKAWA, Y [1 ]
机构：
[1] UNIV TOKYO, MINATO KU, TOKYO 106, JAPAN
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 19-20卷
关键词：
D O I：
10.1016/S0168-583X(87)80156-8
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：777 / 781
页数：5
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