DETERMINATION OF THICKNESS AND ROUGHNESS OF THIN COPPER-FILMS BY X-RAY-DIFFRACTION MEASUREMENTS

被引：6
|
作者：
HAUPL, K [1 ]
WISSMANN, P [1 ]
机构：
[1] UNIV ERLANGEN NURNBERG,INST PHYS & THEORET CHEM,D-8520 ERLANGEN,FED REP GER
来源：
FRESENIUS ZEITSCHRIFT FUR ANALYTISCHE CHEMIE | 1983年 / 314卷 / 03期
关键词：
D O I：
10.1007/BF00516835
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
引用
收藏
页码：337 / 339
页数：3
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