DETERMINATION OF THICKNESS AND ROUGHNESS OF THIN COPPER-FILMS BY X-RAY-DIFFRACTION MEASUREMENTS

被引：6
|
作者：
HAUPL, K [1 ]
WISSMANN, P [1 ]
机构：
[1] UNIV ERLANGEN NURNBERG,INST PHYS & THEORET CHEM,D-8520 ERLANGEN,FED REP GER
来源：
FRESENIUS ZEITSCHRIFT FUR ANALYTISCHE CHEMIE | 1983年 / 314卷 / 03期
关键词：
D O I：
10.1007/BF00516835
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
引用
收藏
页码：337 / 339
页数：3
相关论文
共 50 条
  • [1] DETERMINATION OF SURFACE-ROUGHNESS FROM X-RAY-DIFFRACTION MEASUREMENTS ON THIN-FILMS
    FISCHER, W
    WISSMANN, P
    APPLICATIONS OF SURFACE SCIENCE, 1982, 11-2 (JUL): : 109 - 117
  • [2] THICKNESS DETERMINATION OF LB FILMS BY X-RAY-DIFFRACTION
    OKADA, S
    NAKANISHI, H
    MATSUDA, H
    KATO, M
    NISHIYAMA, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1989, 28 (10): : 1926 - 1927
  • [3] DETERMINATION OF THICKNESS OF MULTIPLE LAYER THIN-FILMS BY AN X-RAY-DIFFRACTION TECHNIQUE
    CHAUDHURI, J
    HASHMI, F
    JOURNAL OF APPLIED PHYSICS, 1994, 76 (07) : 4454 - 4456
  • [4] X-RAY-DIFFRACTION STRESS MEASUREMENTS IN THIN-FILMS
    LOUZON, TJ
    SPENCER, TH
    SOLID STATE TECHNOLOGY, 1975, 18 (07) : 25 - 28
  • [5] X-RAY-DIFFRACTION STRESS MEASUREMENTS IN THIN-FILMS
    LOUZON, TJ
    SPENCER, TH
    WESTERN ELECTRIC ENGINEER, 1974, 18 (04): : 10 - 16
  • [6] THICKNESS DETERMINATION OF THIN COATINGS BY OBLIQUE X-RAY-DIFFRACTION PATTERNS
    BEKRENEV, AN
    FEDOROV, BN
    INDUSTRIAL LABORATORY, 1979, 45 (10): : 1111 - 1114
  • [7] STRESS DETERMINATION IN TEXTURED THIN-FILMS USING X-RAY-DIFFRACTION
    CLEMENS, BM
    BAIN, JA
    MRS BULLETIN, 1992, 17 (07) : 46 - 51
  • [8] X-RAY-DIFFRACTION PROFILE ANALYSIS OF VACUUM-EVAPORATED COPPER-FILMS - NORMAL AND OBLIQUE VAPOR INCIDENCE
    HALDER, SK
    SEN, S
    GUPTA, SPS
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1976, 9 (13) : 1867 - 1879
  • [9] CHARACTERIZATION OF THIN-FILMS - BY X-RAY-DIFFRACTION
    ISHERWOOD, BJ
    GEC-JOURNAL OF SCIENCE & TECHNOLOGY, 1977, 43 (03): : 111 - 124
  • [10] RESIDUAL-STRESS DETERMINATION BY X-RAY-DIFFRACTION IN TUNGSTEN THIN-FILMS
    BADAWI, KF
    NAUDON, A
    GOUDEAU, P
    APPLIED SURFACE SCIENCE, 1993, 65-6 : 99 - 105
12345