AUGER-ELECTRON SPECTROSCOPY DEPTH PROFILING OF AL-SI AND AL-SI-CU INTERCONNECT FILMS ON SILICON

被引：0
|
作者：
STRAUSSER, YE
JOHANNESSEN, JS
机构：
[1] VARIAN ASSOC,PALO ALTO,CA 94303
[2] STANFORD UNIV,STANFORD,CA 94305
来源：
JOURNAL OF ELECTRONIC MATERIALS | 1976年 / 5卷 / 04期
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页码：448 / 448
页数：1
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