AUGER-ELECTRON SPECTROSCOPY DEPTH PROFILING OF AL-SI AND AL-SI-CU INTERCONNECT FILMS ON SILICON

被引：0

作者：

STRAUSSER, YE

JOHANNESSEN, JS

机构：

[1] VARIAN ASSOC,PALO ALTO,CA 94303

[2] STANFORD UNIV,STANFORD,CA 94305

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1976年 / 5卷 / 04期

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：448 / 448

页数：1

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