A GENERAL PROTOCOL FOR THE RECONSTRUCTION OF 3D ATOM-PROBE DATA

被引：333
|
作者：
BAS, P
BOSTEL, A
DECONIHOUT, B
BLAVETTE, D
机构：
[1] Université de Rouen, Laboratoire de Microscopie Ionique, URA CNRS 808
来源：
APPLIED SURFACE SCIENCE | 1995年 / 87-8卷 / 1-4期
关键词：
D O I：
10.1016/0169-4332(94)00561-3
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Data collected with 3D atom probes have to be carefully analysed in order to give reliable composition data precisely positioned in the probed volume. Indeed, the large analysed surfaces of 3D atom probes require the development of reconstruction methods taking into account the tip geometry. When the analysis does not take place in the close vicinity of the tip axis, the analysis direction is no longer perpendicular to the evaporated surface. The influence of this effect on the local magnification and atom positioning must be taken into account. The proposed procedure will be validated by studying the effects of calculations on a long-range-ordered phase.
引用
收藏
页码：298 / 304
页数：7
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