FUNDAMENTALS OF ION-BEAM-ASSISTED DEPOSITION - TECHNIQUE AND FILM PROPERTIES

被引：58
|
作者：
HUBLER, GK
机构：
来源：
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING | 1989年 / 115卷
关键词：
D O I：
10.1016/0921-5093(89)90677-1
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：181 / 192
页数：12
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