THEORETICAL CONSIDERATIONS IN LATERAL DAMAGE DISTRIBUTION FORMED BY ION-IMPLANTATION

被引：12

作者：

MATSUMURA, H ^{[1
]}

FURUKAWA, S ^{[1
]}

机构：

[1] TOKYO INST TECHNOL,FAC COORDINATED SCI,DEPT ELECTR & SYST,YOKOHAMA,JAPAN

来源：

关键词：

D O I：

10.1143/JJAP.14.1783

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1783 / 1790

页数：8

共 50 条

[41] MODIFICATIONS IN FATIGUE DAMAGE OF COPPER INDUCED BY ION-IMPLANTATION
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