EXCIMER ULTRAVIOLET GAS-DISCHARGE XEF, XECL, KRF LASERS

被引：0
|
作者：
KUDRYAVTSEV, YA [1 ]
KUZMINA, NP [1 ]
机构：
[1] ACAD SCI USSR,SPECT INST,MOSCOW,USSR
来源：
KVANTOVAYA ELEKTRONIKA | 1977年 / 4卷 / 01期
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D O I：
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：220 / 222
页数：3
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