DIELECTRIC-BREAKDOWN STUDY OF THIN LA2O3 FILMS

被引：13
|
作者：
SINGH, A
机构：
来源：
THIN SOLID FILMS | 1983年 / 105卷 / 02期
关键词：
D O I：
10.1016/0040-6090(83)90205-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：163 / 168
页数：6
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