PREPARATION OF SELF-SUPPORTING SINGLE-CRYSTAL CVD TUNGSTEN FILMS

被引：0
|
作者：
SRINIVASAN, S [1 ]
REICHELT, K [1 ]
WENZL, H [1 ]
机构：
[1] KERN FORSCH ANLAGE JULICH,INST FESTKORPERFORSCH,517 JULICH,FED REP GER
来源：
NUCLEAR INSTRUMENTS & METHODS | 1975年 / 125卷 / 04期
关键词：
D O I：
10.1016/0029-554X(75)90477-2
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：599 / 600
页数：2
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