A STUDY ON SYNTHESIS OF DIAMOND BY CAPACITIVELY COUPLED RF PLASMA-ASSISTED CHEMICAL VAPOR-DEPOSITION

A capacitively coupled RF plasma-assisted chemical vapor deposition reactor was used to synthesize diamond. A diamond phase (sp3C-C bonds) was detected in the deposits by Raman scattering spectroscopy. Its concentration, measured by core electron energy loss spectroscopy (CEELS), was estimated to be about 40%. The amount of hydrogen in the deposits measured by hydrogen profiling by helium ions was of the order of 1% regardless of the growth conditions. These results suggested a possibility of diamond synthesis by a capacitively coupled RF PACVD technique. © 1992.