DEPOSITION OF DIAMOND-LIKE CARBON (DLC) AND C-N FILMS USING ION-BEAM-ASSISTED DEPOSITION (IBAD) TECHNIQUE AND EVALUATION OF THEIR PROPERTIES

被引：3
|
作者：
PAL, JP
PATIL, SC
OGALE, SB
KANETKAR, SM
GANPATHY, L
RAO, PR
机构：
[1] UNIV POONA,DEPT PHYS,POONA 411007,MAHARASHTRA,INDIA
[2] EXCEL SUPERCOND INC,BOHEMIA,NY 11710
来源：
BULLETIN OF MATERIALS SCIENCE | 1994年 / 17卷 / 06期
关键词：
ION BEAM ASSISTED DEPOSITION; DLC FILMS; C-N FILMS; TRIBOLOGICAL PROPERTIES; RBS ANALYSIS;
D O I：
10.1007/BF02757560
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Diamond like carbon Alms and C-N films were prepared using ion beam assisted deposition technique (IBAD). Tribological properties were studied by subjecting DLC coated films to the accelerated wear tests. These tests indicated a significant improvement in the mechanical surface properties of glass by DLC coating. Better wear features were obtained for thinner DLC coating as compared to the thicker ones. We also studied the optical properties and obtained a band gap of 1.4 eV for these films. An attempt was made to prepare C3N4 films by using IBAD. We observed Variation in the nitrogen incorporation in the film with the substrate temperature.
引用
收藏
页码：829 / 839
页数：11
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