EPITAXIAL-GROWTH ON SIMOX WAFERS

被引：0

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作者：

LAM, HW ^{[1
]}

机构：

[1] LAM ASSOCIATES,DALLAS,TX 75374

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1986年 / 133卷 / 03期

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D O I：

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中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

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页码：C95 / C95

页数：1

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