RESOLUTION OF PHOTOCHEMICAL ETCHING OF SEMICONDUCTORS

被引：0

作者：

BELYAKOV, LV ^{[1
]}

GORYACHEV, DN ^{[1
]}

PARITSKII, LG ^{[1
]}

RYVKIN, SM ^{[1
]}

SRESELI, OM ^{[1
]}

机构：

[1] AF IOFFE ENGN PHYS INST,LENINGRAD,USSR

来源：

SOVIET PHYSICS SEMICONDUCTORS-USSR | 1976年 / 10卷 / 06期

关键词：

D O I：

暂无

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

引用

页码：678 / 681

页数：4

共 50 条

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