SKEW AND KURTOSIS OF LOW-ENERGY HEAVY-ION DISTRIBUTIONS IMPLANTED IN SILICON AND ALUMINUM

被引：0
|
作者：
KISIELEWICZ, M
机构：
来源：
PHYSICS LETTERS A | 1983年 / 93卷 / 08期
关键词：
D O I：
10.1016/0375-9601(83)90473-5
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
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页码：411 / 413
页数：3
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