High efficiency single crystal silicon solar cells

100 mu m thick high efficiency single crystal solar cell with the conversion efficiency of 17% under AM0 (Air Mass 0) and 28 degrees C, has been developed as the power source of space satellites. This solar cell has the NRS/BSF (Non-Reflective Surface/totally diffused BSF), and passivated rear and front surfaces. The solar cell has 17 mW/cm(2) electrical output which is 21% higher than that of 100 mu m thick conventional flat surface BSFR cell after 1MeV electron irradiation up to 1E15 e/cm(2). The solar cell satisfied the reliability requirements for space use and are going to be qualified by NASDA (National Space Development of Agency of Japan) type approval program. Some satellite programs of NASDA, ISAS (Institute of Space and Astronautical Science) and foreign countries are decided to use the solar cells.