PLASMA PARAMETERS OF A RADIO-FREQUENCY DISCHARGE

被引：9
|
作者：
ANDERSON, CA
HOPKINS, MB
GRAHAM, WG
机构：
[1] DUBLIN CITY UNIV,DEPT PHYS,DUBLIN,IRELAND
[2] QUEENS UNIV BELFAST,DEPT PHYS,BELFAST BT7 1NN,ANTRIM,NORTH IRELAND
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1990年 / 61卷 / 01期
关键词：
D O I：
10.1063/1.1141269
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A low-frequency (100 kHz) radio frequency discharge has been characterized by making time-resolved measurements of the basic plasma parameters, including the electron energy-distribution function. Measurements obtained when operating with H2, D2, and Ar are compared. Surprisingly low electron temperatures (∼0.2 eV) have been found in H2 and D 2 discharges.
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页码：448 / 450
页数：3
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