CONTROL OF UHF REGIMES OF VACUUM-PLASMA TREATMENT OF MICROELECTRONIC STRUCTURES

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作者：
GULYAEV, YV
YAFAROV, RK
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PISMA V ZHURNAL TEKHNICHESKOI FIZIKI | 1989年 / 15卷 / 01期
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O59 [应用物理学];
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页码：74 / 78
页数：5
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