PROPERTIES OF MAGNETRON SPUTTERED HYDROGENATED AMORPHOUS AND MICROCRYSTALLINE SILICON FILMS ALLOYED WITH GERMANIUM

被引：3
|
作者：
SAITO, N
TERADA, T
YAMAGUCHI, T
机构：
[1] Shizuoka Univ, Hamamatsu, Jpn, Shizuoka Univ, Hamamatsu, Jpn
来源：
JOURNAL OF NON-CRYSTALLINE SOLIDS | 1986年 / 83卷 / 1-2期
关键词：
D O I：
10.1016/0022-3093(86)90055-4
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
FILMS
引用
收藏
页码：42 / 48
页数：7
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