A stretchable nanoscale dielectric for large-area wearable electronics

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Nature Electronics | 2023年 / 6卷
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Conventional dielectric layers used in stretchable electronics are solution-processed, thick and have poor electrical performance compared with rigid, inorganic dielectrics. A stretchable nanometre-thick gate dielectric layer has been produced using large-area vacuum deposition. This material has excellent electrical, mechanical and chemical properties and could facilitate the development of high-performance wearable devices.
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页码：107 / 108
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