Influence of laser conditioning on laser induced damage threshold of single layers of ZrO2 with various deposition conditions

Single layers of ZrO2 were coated at base pressure of 10−5 mbar by electron beam evaporation (EBE) technique. The influence of oxygen partial pressure on spectral properties and laser induced damage threshold (LIDT) of the samples were investigated. Spectral transmittance of the samples was measured by spectrophotometer. Laser induced damage threshold was detected according to ISO standard 11254. Laser conditioning was conducted by scanning the surface of the samples. Results showed that laser damage resistance was enhanced by increasing the oxygen partial pressure during deposition. LIDT of the samples was changed after laser conditioning. Experimental results revealed that there is enhancement of laser damage resistance of the samples with higher oxygen partial pressure after laser conditioning.