Hot embossing of microstructure with moving induction heating and gas-assisted pressuring

被引:0
|
作者
Ching-Chieh Kao
Kun-Cheng Ke
Wei-Cheng Hung
Sen-Yeu Yang
机构
[1] National Taiwan University,Department of Mechanical Engineering
来源
Microsystem Technologies | 2020年 / 26卷
关键词
D O I
暂无
中图分类号
学科分类号
摘要
A new apparatus for a moving induction heating and gas-assisted hot embossing apparatus has been developed. A mechanism was designed and implemented to move the platform in and out the wrapped coil, on which the sealed box for substrate/mold was placed. A chamber of 195 mm diameter and 221 mm length was machined. The movable platform, the sealed box with substrate/mold stack, wrapped coil and cooling fan were all implemented in the high pressure chamber. The nine-point thermocouples attached on the mold, thus, a temperature history of the moving induction heating can be obtained and study the influence of the moving path and power on the heating rate and temperature distribution. The micro V-cut structure hot embossing experiment were performed to prove the potential of this moving induction heating and gas-assisted pressuring hot embossing for fast fabrication of microstructure onto polymeric substrates. As a results, replication rates were all above 95% at 200 °C and 5 kgf/cm2 and the cycle time was less than 4 min and the optic measurement shows the replicated V-cut film can enhance the 36.8% illuminance. The experiment results show the manufacturing potential of this apparatus.
引用
收藏
页码:957 / 967
页数:10
相关论文
共 50 条
  • [21] Replication of large-area microstructures by combining movable induction heating and roller hot embossing
    Hung, Wei-Cheng
    Chiu, Chun-Yang
    He, Jyun-Wei
    Ke, Kun-Cheng
    Yang, Sen-Yeu
    POLYMER ENGINEERING AND SCIENCE, 2024, 64 (05): : 2191 - 2201
  • [22] Gas-assisted light-cure microstructure transfer molding and transfer transformation
    Yung-Jin Weng
    Che-Lin Chang
    Yi-Hui Hsiao
    Microsystem Technologies, 2017, 23 : 1081 - 1090
  • [23] Gas-assisted light-cure microstructure transfer molding and transfer transformation
    Weng, Yung-Jin
    Chang, Che-Lin
    Hsiao, Yi-Hui
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2017, 23 (04): : 1081 - 1090
  • [24] Gas-assisted microstructure elastic multiform UV imprint replication molding technology
    Lien, Cheng-Chang
    Weng, Yung-Jin
    Tsai, Chun-Yu
    Wu, Shih-Hsuan
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2017, 23 (06): : 1897 - 1906
  • [25] Finite element analysis of ultrasonic vibration-assisted microstructure hot glass embossing process
    LanPhuong Nguyen
    Wu, Ming-Hui
    Hung, Chinghua
    AUSTRALIAN JOURNAL OF MECHANICAL ENGINEERING, 2019, 17 (03) : 199 - 208
  • [26] Fabrication of buried waveguide microstructure using gas-assisted micro/nanoimprinting with soft mold
    Weng, Y. -J.
    Yang, S. -Y.
    Weng, Y. -C.
    Wang, L. A.
    POLYMERS FOR ADVANCED TECHNOLOGIES, 2007, 18 (12) : 993 - 998
  • [27] Hot single-point incremental forming assisted by induction heating
    Al-Obaidi, Amar
    Kraeusel, Verena
    Landgrebe, Dirk
    INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2016, 82 (5-8): : 1163 - 1171
  • [28] Hot single-point incremental forming assisted by induction heating
    Amar Al-Obaidi
    Verena Kräusel
    Dirk Landgrebe
    The International Journal of Advanced Manufacturing Technology, 2016, 82 : 1163 - 1171
  • [29] OPTIMIZATION OF BACK-PROPAGATION ALGORITHM AND GAS-ASSISTED ANN MODELS FOR HOT METAL DESULFURIZATION
    DEO, B
    DATTA, A
    KUKREJA, B
    RASTOGI, R
    DEB, K
    STEEL RESEARCH, 1994, 65 (12): : 528 - 533
  • [30] Feasibility evaluation of gas-assisted heating for mold surface temperature control during injection molding process
    Chen, Shia-Chung
    Chien, Rean-Der
    Lin, Su-Hsia
    Lin, Ming-Chung
    Chang, Jen-An
    INTERNATIONAL COMMUNICATIONS IN HEAT AND MASS TRANSFER, 2009, 36 (08) : 806 - 812