A Thin-Film Piezoelectric Pressure Sensor

被引:0
|
作者
A. A. Kazaryan
机构
来源
Measurement Techniques | 2002年 / 45卷
关键词
Physical Chemistry; Analytical Chemistry; Experimental Investigation; Pressure Sensor; Piezoelectric Pressure Sensor;
D O I
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中图分类号
学科分类号
摘要
The results of a theoretical and experimental investigation of thin-film piezoelectric pressure sensors are presented.
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页码:515 / 518
页数:3
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