Tribological Properties of Patterned NiFe-Covered Si Surfaces

The tribological properties of patterned surfaces were investigated under lubricated conditions. Micropatterns were fabricated on a Si surface using a combination of photolithography and plasma etching. NiFe film with a 150 nm thickness was then deposited on the patterned Si surface. We prepared four kinds of patterned surfaces: dimple, grating, bump, and mesh patterns. The dimensions of the patterns were: size 30–40 μm, pitch 120 μm, and depth 10–12 μm. Friction tests were carried out using a pin-on-plate tribometer. The pin specimen was made of cast iron and had a flat end. The normal load was varied from 9.8 to 98 mN, and the average sliding speed from 1.0 to 5.0 mm s−1. Slideway lubricating oils or a gear oil were used as the lubricant, and the ISO viscosity grades of these oils were VG32, VG68, and VG320. The results showed that the friction coefficients of the two reverse patterns showed very similar tendencies and that circular patterns had a lower friction coefficient than did the rectangular patterns at a high bearing characteristic number. The surface geometry of the Si surface did not affect the friction coefficients at a low bearing characteristic number.