On the Sputtering of Copper Phthalocyanine Molecules on a GaAs Substrate under Bombardment with Multiply Charged Ions

被引：0
|
作者：
Sh. Dj. Akhunov
U. Kh. Rasulev
D. T. Usmanov
机构：
[1] Institute of Ion-Plasma and Laser Technologies,
[2] Uzbekistan Academy of Sciences,undefined
来源：
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques | 2021年 / 15卷
关键词：
secondary-ion mass spectrometry; cluster; multiply charged ion; phthalocyanine; Bi; ion source; nonadditive effects;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：396 / 400
页数：4
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