Development of a precision hot embossing tool with microstructures for microfabrication

Hot embossing molding is a promising method to fulfill fabrication of microstructures. The surface flatness of a hot embossing tool is the key parameter affecting the transcription rate significantly of the micro-hot embossing process. This study demonstrated a technology for fabricating a precision hot embossing tool using hybrid materials. The silicone rubber mold was chosen as a bridge tooling, which is the key process for fabricating a precision hot embossing tool using hybrid materials. The mold plate can improve the surface flatness of the fabricated hot embossing tool during post-curing. The surface flatness of the hot embossing tool around 46.38% can be improved and a cost reduction around 69.61% can be achieved.