Fabrication of High Resolution Microstructures Using Micro Hot Embossing with a Precision Rapid Tooling

Diffractive optical element (DOE) is widely employed to convert light wave fronts in many different applications. This study demonstrated a precision hybrid rapid tooling for manufacturing the DOE. The transcription rate in the rapid tooling manufacturing process is about 92.5%. The transcription rate in the molded part is about 95.1%. Hybrid rapid tooling technology not only reduces the fabrication cost of rapid tooling but also has higher form accuracy and higher thermal conductivity. In comparison with conventional method for fabricating a pair of rapid tooling of a new DOE, a cost reduction of 60.4% can be achieved using a hybrid rapid tooling technology.