Research on the control systems of a precision linear motor drive device

被引：0
|
作者：
Yan H. [1 ]
Wang X.-K. [1 ]
Duan G.-H. [1 ]
机构：
[1] Department of Mechanical Engineering, Tsinghua University
来源：
Frontiers of Mechanical Engineering in China | 2006年 / 1卷 / 3期
基金：
中国国家自然科学基金;
关键词：
Disturbance observer; Feedforward error compensation; Input revising; Precision linear motor drive;
D O I：
10.1007/s11465-006-0036-9
中图分类号：
学科分类号：
摘要：
The model of a precision linear motor drive device (PLMDD) and its control requirements are analyzed. In order to enhance the tracking and anti-disturbance performance of the system, its third-order model is established, and disturbance-observer based input revising feedforward error compensation robust control algorithm, combined with integral-separated proportional integral derivative (PID) control algorithm is proposed. This includes feedback control algorithm and feedforward control algorithm. The feedback controller improves system tracking performance and suppresses load and mechanical disturbance while the feedforward controller compensates phase hysteresis introduced by feedback control. Theoretical analyses, simulations and experiments show that this control method increases the tracking precision of PLMDD from ±5 μm to ±2 μm and dramatically improves its anti-disturbance ability. © Higher Education Press 2006.
引用
收藏
页码：260 / 264
页数：4
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