A study of the effect of synchrotron radiation exposure on the thermophysical parameters of the PMMA X-ray resist

被引：0
|
作者：
A. N. Gentselev
B. G. Gol’denberg
E. V. Petrova
V. F. Pindyurin
A. S. Kozlov
机构：
[1] Russian Academy of Sciences,Budker Institute of Nuclear Physics, Siberian Branch
[2] Russian Academy of Sciences,Institute of Chemical Kinetics and Combustion, Siberian Branch
来源：
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques | 2012年 / 6卷
关键词：
Differential Scanning Calorimetry; PMMA; Neutron Technique; Exposure Dose; Number Average Molecular Weight;
D O I：
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学科分类号：
摘要：
Differential scanning calorimetry and thermogravimetric analysis results for polymethyl methacrylate (PMMA, monomer with the atomic formula C5H8O2) samples, extensively used as an X-ray resist, are presented. The size distribution of aerosol particles formed by PMMA sample ablation under terrahertz radiation is obtained. The size dependence of the coil-like macromolecules of irradiated PMMA on the exposure dose is found experimentally, and a descriptive model is proposed that is well consistent with the characteristic curve. The processes occurring during irradiation of PMMA are explained (at the qualitative level), and recommendations on intensive SR irradiation of PMMA are given.
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页码：12 / 18
页数：6
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