Comparison of Characteristics of Thin PZT Films on Si-on-Sapphire and Si Substrates

被引：0
|
作者：
L. A. Delimova
N. V. Zaitseva
V. V. Ratnikov
V. S. Yuferev
D. S. Seregin
K. A. Vorotilov
A. S. Sigov
机构：
[1] Ioffe Institute,
[2] MIREA—Russian Technological University,undefined
来源：
Physics of the Solid State | 2021年 / 63卷
关键词：
ferroelectric films; PZT; nonswitchable polarization; hysteresis loops; current–voltage characteristics; photoelectric current; mechanical deformations and stresses;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：1145 / 1152
页数：7
相关论文
共 50 条
  • [1] Comparison of Characteristics of Thin PZT Films on Si-on-Sapphire and Si Substrates
    Delimova, L. A.
    Zaitseva, N., V
    Ratnikov, V. V.
    Yuferev, V. S.
    Seregin, D. S.
    Vorotilov, K. A.
    Sigov, A. S.
    PHYSICS OF THE SOLID STATE, 2021, 63 (08) : 1145 - 1152
  • [2] Piezoelectric RF MEMS Switches on Si-on-Sapphire Substrates
    Benoit, Robert R.
    Rudy, Ryan Q.
    Pulskamp, Jeffrey S.
    Polcawich, Ronald G.
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2020, 29 (05) : 1087 - 1090
  • [3] Ferroelectric PZT thin films on Si and SBN substrates
    Neurgaonkar, RR
    Nelson, JG
    Lin, J
    Cheng, J
    MINIATURIZED SYSTEMS WITH MICRO-OPTICS AND MICROMECHANICS II, 1997, 3008 : 350 - 358
  • [4] Comparison of ZnO thin films grown by pulsed laser deposition on sapphire and Si substrates
    Han, L.
    Mei, F.
    Liu, C.
    Pedro, C.
    Alves, E.
    PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2008, 40 (03): : 699 - 704
  • [5] Interfacial microstructure in Si-on-sapphire heterostructure
    Gartstein, E
    Mogilyanski, D
    Frumin, N
    JOURNAL OF CRYSTAL GROWTH, 1999, 205 (1-2) : 64 - 70
  • [6] Ferroelectric properties of PZT thin films deposited on ZnO/Si substrates
    Lee, SH
    Ryu, MK
    Kim, JP
    Kim, SR
    Heo, JY
    Jang, MS
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2003, 42 : S1105 - S1107
  • [7] EVALUATION OF PZT THIN-FILMS ON AG COATED SI SUBSTRATES
    ZHANG, HX
    KARJALAINEN, P
    UUSIMAKI, A
    LEPPAVUORI, S
    JOURNAL OF ELECTRONIC MATERIALS, 1994, 23 (12) : 1279 - 1284
  • [8] On the interface strain distribution in Si-on-sapphire system
    Gartstein, E
    Lach, S
    Mogilyanski, D
    Metzger, H
    Peisl, J
    PHYSICA B, 1998, 248 : 79 - 82
  • [9] Pyroelectric properties of PZT(90/10) thin films on Pt/Si substrates
    Huang, J
    Lian, JY
    Buchanan, RC
    ISAF '96 - PROCEEDINGS OF THE TENTH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS, VOLS 1 AND 2, 1996, : 623 - 626
  • [10] Morphology, strain and microstructure interrelation in Si-on-sapphire heterostructure
    Gartstein, E
    Mogilyanski, D
    Metzger, H
    SURFACE REVIEW AND LETTERS, 1999, 6 (06) : 1003 - 1013
12345