A Feasibility Study on the Micro Eletro-Discharge Machining Process for Photomask Fabrication

被引：0
|
作者：
S.H. Yeo
G.G. Yap
机构：
[1] School of Mechanical and Production Engineering,
[2] Nanyang Technological University,undefined
[3] Singapore 639798,undefined
来源：
The International Journal of Advanced Manufacturing Technology | 2001年 / 18卷
关键词：
Keywords:Micro electro-discharge macining; Photomask; Rapid prototyping;
D O I：
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学科分类号：
摘要：
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页码：7 / 11
页数：4
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