Modeling and simulation of non-uniformity in the planarization process

The estimation of surface non-uniformity under various machining parameters (such as dressing force, diamond density of dresser, rotational speed of dresser, different machining paths, etc.) is essential to the planarization process. Based on abrasive theory and the deformation analyses of a polishing pad, this paper develops a model to calculate material removal in the planarization process and then calculate non-uniformity by using this model. The results reveal that the non-uniformity is in good agreement with experimental data. Moreover, it was found that the non-uniformity decreased when the dressing time increased.