Two-stage compliant microleverage mechanism optimization in a resonant accelerometer

被引：0

作者：

X.-P.S. Su

H.S. Yang

机构：

[1] Department of Mechanical Engineering,

[2] University of California,undefined

[3] Berkeley,undefined

[4] CA 94720,undefined

[5] USA e-mail: xpsu@newton.berkeley.edu,undefined

[6] Applied Materials,undefined

[7] 3320 Scott Boulevard,undefined

[8] M/S 1158,undefined

[9] Santa Clara,undefined

[10] CA 95054,undefined

[11] USA,undefined

来源：

Structural and Multidisciplinary Optimization | 2001年 / 22卷

关键词：

Key words: resonant accemherometer, leverage mechanism, force amplification, compliant mechanism;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Compliant microleverage mechanisms can be used in micro-electro-mechanical systems (MEMS) to transfer an input force/displacement to an output to achieve mechanical/geometrical advantages. By stacking multiple stages of microlevers together, a compound microleverage mechanism is obtained with a higher amplification factor. This paper presents the analysis and optimization of a two-stage microleverage mechanism in a resonant output micro-accelerometer for force amplification. It is found that the compliance of the two-stage mechanism needs to be appropriately distributed in order for both stages to have the desired amplification effect.

引用

页码：328 / 334

页数：6

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