共 50 条
- [22] Thin film metrology using modal wavefront sensing JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS, 2005, 7 (06): : S290 - S297
- [25] Simultaneous measurement of surface profile and thickness variation of transparent parallel plate using wavelength tuning Fizeau interferometer LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING (LAMOM) XXIII, 2018, 10519
- [26] High precision surface metrology using a phase retrieval method 9TH INTERNATIONAL CONFERENCE ON X-RAY MICROSCOPY, 2009, 186
- [27] In-Process Surface Metrology for Thin Film Flexible Electronic Devices SURFACE ENGINEERING AND FORENSICS, 2023, 12490
- [28] Determination of surface profiles of transparent plates by means of frequency estimation with wavelength tuning interferometry SEVENTH INTERNATIONAL CONFERENCE ON OPTICAL AND PHOTONIC ENGINEERING (ICOPEN 2019), 2019, 11205