Precision interferometric surface metrology of transparent thin film using wavelength tuning

被引:0
|
作者
Yangjin Kim
机构
[1] Pusan National University,School of Mechanical Engineering
来源
Journal of Mechanical Science and Technology | 2017年 / 31卷
关键词
Precision measurement; Interferometry; Thin film; Surface profile; Phase shifting algorithm; Phase error;
D O I
暂无
中图分类号
学科分类号
摘要
Indium tin oxide (ITO) thin films are the important component in display and semiconductor industries because of their excellent electrical and optical properties. To improve the reliability and performance of these films, the surface shape and thickness should be measured accurately. In this research, the surface topography of an ITO thin film on the surface of a supporting plate was measured by wavelength tuned phase shifting interferometer and polynomial window function. The surface topography is measured by compensating for the phase difference error caused by interference of the transparent thin film. Optical interference is formulated by the phase and amplitudes determined by wavelength tuning and polynomial window function. The measurement method allows for noncontact (nondestructive), large aperture, and nanoscale measurement of highly reflective thin films.
引用
收藏
页码:5423 / 5428
页数:5
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