Annealing effect on the structure, phase composition, and nanohardness of titanium/fullerite films

被引：0
|
作者：
L. V. Baran
机构：
[1] Belarussian State University,
来源：
Inorganic Materials | 2010年 / 46卷
关键词：
Fullerene; Indentation Depth; Annealing Effect; Annealed Film; Topographic Atomic Force Microscopy Image;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The effect of heat treatment on the structure, phase composition, and nanohardness of titanium/fullerite films of different thicknesses produced by thermal evaporation in vacuum has been studied using atomic force microscopy, X-ray diffraction, and nanoindentation. The results demonstrate that annealing at 570 K increases the grain size of the films and leads to the formation of a TixC60 phase. The nanohardness of the annealed films varies little with depth owing to the interdiffusion of Ti atoms and C60 molecules.
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页码：824 / 832
页数：8
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